基于光杠杆原理测量压电陶瓷压电特性的方法.pdf.pdf

第 37 卷,增刊红外与激光工程 2008 年 4 月
Supplement Infrared and Laser Engineering Apr. 2008
基于光杠杆原理测量压电陶瓷压电特性的方法
潘在友,刘惠兰,冯丽爽,邢济武
(北京航空航天大学仪器科学与光电工程学院, 北京 100083)
摘要: 提出了一种基于光杠杆原理测量压电陶瓷伸长量,对压电陶瓷压电特性进行检测验证的
方法。该方法不需要专门的测量仪器,采用常用的材料搭建简便的光路,运用光杠杆原理通过对反
射光斑位移的测量,测得不同的电压驱动时压电陶瓷相应的伸长量。文中介绍了光路的搭建,并且
对相应的实验数据进行处理和分析。结果显示,在外加电压为 0~60 V 之间,所取的 6 个点所测的压
电陶瓷的伸长量与厂家给出相应参数基本相符,满足实验室对压电陶瓷压电特性测定的要求。
关键词: 光杠杆原理; 压电陶瓷; 压电特性
中图分类号:TB921 文献标识码:A 文章编号:1007-2276(2008)增( 几何量) -0196-04
Testing method of dilation of the piezoelectric ceramics
based on optical lever theor y
PAN Zai-you, LIU Hui-lan, FENG Li-shuang, XING Ji-wu
(School of Inst rument Science and Opto-el ect ronics Engineering, Bei hang University, Bei jing 100083, China)
Abstr act:A testing method based on optical lever theory for the measurement of the piezoelectric
property of the piezoelectric cera mics (PZT) is presented. The method uses ordinary materials and
apparatus to form light path. It can measure the micro dilation of the PZT by measuring the displacement of
the reflected light spot. The light path is built and the experimental data are analyzed. The results of the
PZT dilation accorded with the factory parameters. The method is simple and convenient and satisfies the
requirement of the measurement of the piezoelectric property of PZT.
Key wor ds: Optical lever theory; Piezoelectric ceramic