cu（ⅰ）金属有机化学气相沉积前驱物的合成与表征-物理化学专业毕业论文.docx

***二元体系在减压、常压及加压条件下的共沸点数据,并对数据进行了关联。从关联的结果可知,其共沸组成与共沸温度、压力的对数与共沸温度的倒数均呈良好的线性关系,计算结果与实验值符合良好。随着压力的降低,这两个二元体系中MPP的含量都增加,说明在减压条件下更利于MPP的分离和提纯。特别是 MPP.***体系, kPa下,%。这项研究为MPP 工业化过程中共沸混合物的分离、提纯,以及共沸精馏、反应精馏等工艺与装置的研究与设计提供了重要的基础数据和参考依据。
关键词:铜(I)前驱物,合成与表征, l,5-环辛二烯,环戊烯,环戊二烯,共沸点,
Abstract
Chemical Vapor Deposition(CVD)of conformal copper thin films is required for the metallization of multilayered integrated circuits(ULSI).The ability to fill hi曲一aspect ratio holes requires a technique such as anic Chemical Vapor Deposition(MOCVD).Specifically,research geared toward the synthesis and identification ofthe volatile metal copper(I)precursors,
A standard Schlenk line has been designed and constructed,and the MOCVD precursors(hfac)Cu(I)(alkene),where hfac=hexafluoroacetylacetone,alkene=COD (1,5-cyclooctadiene),CPE(cyclopentene),CPD(cyclopentadiene),have been prepared in one step,and further characterized by‘H-NMR,FTIR,DSC—TGA.
(hfac)Cu(I)(COD)is a bright yellow crystalline powder synthesized at room temperature and sublimed at 60。C and at sub-atmospheric is pure shown by the spectroscopy‘H·NMR and F1、 themnal stability characterized by DSC—
TGA reveals pound is a good precursor for Cu MOCVD.
(hfac)Cu(I)(CPE)is a light yellow crystalline powder synthesized at 10。C and sublimed at 25。C and at 40 is also pure shown by the spectroscopy 1H—NMR and thermal analysis data characterized by DSC—TGA show thermal stability of pound is not very well and the bond breaking temperature for
Cu-CPE is approximately 。C.
(hfac)Cu(I)(CPD)is a green yellow slimy solid synthesized at room temperature and sublimed at 55。C and at by the spectroscopy‘H-NMR and FTIR shows that pound is a mixture probably including cyclopentadiene thermal analysis data characterized by
shows thermal stability of pound is good and the bond breaking temperature for is approximately 。