四探针方块电阻测试系统误差研究及可靠性分析.docx

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Research on reliability and measurement errors of Four-Point Probe square resistance Tester
ABSTRACT
Four-point probe (also called membrane resistance tester) is one of the testing instruments that used in semiconductor manufacturing. It can measure the resistivity of semiconductor materials, the doping concentration and the film thickness of the Semiconductor thin layer materials and control devices and integrated circuit performance.
Currently, with the rapid development of semiconductor integrated circuits technology, the related testing technology also developed a lot. The integration level is getting higher, and the dimensions of the ponents and devices are more and more miniaturized, so the testing system should have superior performances on the measuring accuracy, stability and the ability of data analysis and processing. The measurement of the resistivity of Semiconductor is widely used, the imported measuring equipments are very expensive and the market of homebred probe square resistance and resistivity testing system is very good, so the development of advanced four-point probe square resistance testing system is very meaningful.
This paper analyzed the importance of measuring micro-area resistivity by use of the four-point probe tester, and the measuring principles of several staple four-point probe measuring techniques pared them. It also discussed mon factors which influence the stability of the four-point probe tester. This paper described the overall design ideas and solutions of newly developed digital linear four-point probe thin layer resistivity testing system , expounded its working principle, the position, the requirement of each part. This paper mostly analyses the reliability and measurement errors of this testing system and the reasons and improvement plan to the formation of measurement errors. The non-ideal factors that found in using process are discussed, the outside environment fact
the measurement error and the intrinsic f