北京大学 PPT 模板.ppt

Group Meeting
Dong-Ming Fang
April 18, 2008
Work in the last two weeks
Completed …
1
Read …
2
Read …
3
Read …
4
Downloaded …
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Conceiving …
6
Work in the last two weeks
Completed PPT file for oral speech
In English
Proper
Contents
About 35
Pages
Work in the last two weeks
Thesis draft written by…
Design …
1.
Fabrication …
2.
Measured …
3.
Work in the last two weeks
Processes Information Storage
PECVD:SiO2, Si3N4, SiC
Sputter: Ti, Au, Pt, Al,
Cr, W, Pb
LPCVD: PolySi, SiO2,Si3N4
Si Oxidation:HO,O2,H2O
Membrane
Ion Injection:As+,P+,B+,BF2+
Diffusion: P+,B+
Adjusting
ICP: Si, Ti/Al, Cr/Cu, Cr/Pt,
Ti/Pt/Au, Pyrex, SiO2
RIE:Si,SiO2,Si3N4, SiO2,
Solutions: KOH, BHF,
HF, H3PO4
Etching
Anode (electrostatic),
Au-Si, hot
Bonding
Work in the last two weeks
1. Silicon Microfabrication : …..
2. MEMS Reliability: …..
3. NSFC Requisition : ….
4. Other: Published papers of IME
References and PPT files
Work in the last two weeks
Safety and Operation Handbook
Safety
Exit, Fire extinguisher, Shower equipment, Eye bath system
MSDS
Health hazard, Fire hazard, Specific hazard, Reactivity
Etching
Room
600m2,Etching platform, Shelf, Reagent chemicals
Future work in the next week
Simulate ….
Read …
Learn …
Work in the last week
Passed the …
1
Read references …
2
Simulated and analyzed …
3
Design the fabrication …
4
Work in the last week
Tuning
linearity
Output
power
Frequency
pulling
Tuning
sensitivity
Frequency
range
Harmonic
rejection
Frequency
pushing
The main performance
figures ….