ALow-Cost,SmartCapacitivePositionSensorAbstractAnewhigh-performance,low-cost,capacitiveposition-,shieldingandathree-signalapproach,,anA/-performance,low-cost,capacitivedisplacementmeasuringsystemfeaturing:1mmmeasuringrange,uracy,,thespecificationscorrespondto:apossiblerangeof1pF;only50fFofthisrangeisusedforthedisplacementtransducer;50aFabsolutecapacitance-[l]andmorerecentlyVanDrecht,Meijer,andDeJong[2]haveproposedadisplacement-measuringsystem,usingaPSD(PositionSensitiveDetector)(Light-EmittingDiode)[2],,guardingandsmartA/Dconversion,uracywithaverylowcost--period-,inreturn,puter() Ⅱ.THEELECTRODESTRUCTUREThebasicsensingelementconsistsoftwosimpleelectrodeswithcapacitanceCx,().Thesmallerone(E2),thecapacitanceCxbetweenthetwoelectrodesisindependentofmovements(lateraldisplacementsaswellasrotations)Ⅲ.AccordingtoHeerens[3],therelativedeviationinthecapacitanceCxbetweenthetwoelectrodescausedbythefiniteguardelectrodesizeissmallerthan:δ<e-π(x/d)(1)wherexisthewidthoftheguardanddthedistancebe
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