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Semiconductor.Devices.Physics.and.Technology.3rd.edition.pdf
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3 RD EDITION Semiconductor Devices Physics and Technology S. M. SZE EtronTech Distinguished Chair Professor College of Electrical puter Engineering National Chiao Tung University Hsinchu, Taiwan M. K. LEE Professor Department of Electrical Engineering National Sun Yat-sen University Kaohsiung, Taiwan JOHN WILEY & SONS, INC. Acquisitions Editor Dan Sayre Marketing Manager Christopher Ruel Senior Editorial Assistant Katie Singleton Editorial Program Assistant Samantha Mendel Production Manager Micheline Frederick Cover Designer Wendy Lai Pre-press Service Robots & Cupcakes This book was typeset in Times Roman by the authors and printed and bound by Quad Graphics/Versailles. The cover was printed by Quad Graphics/Versailles. cover photo: ? 2010 IEEE. Reprinted, with permission, from IEDM Technical Digest, S. Whang et. al, "Novel 3-dimensional Dual Control-gate with Surrounding Floating-gate (DC-SF) NAND flash cell for 1Tb file storage application." The book is printed on acid-free paper. Copyright ? 1985, 2002, 2012 by John Wiley & Sons, Inc. All rights reserved. No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, recording, scanning, or otherwise, except as permitted under Sections 107 or 108 of the 1976 United States Copyright Act, without either the prior written permission of the Publisher or authorization through payment of the appropriate per-copy fee to the Copyright Clearance Center, 222 Rosewood Drive, Danvers, MA 01923, (508) 750-8400, fax (508) 750-4470. Requests to the Publisher for permission should be addressed to the Permissions Department, John Wiley & Sons, Inc. 605 Third Avenue, New York, NY 10158-0012, (212) 850-6008, E-mail: PERMREQ@. To order books or for customer service call 1-800-CALL-WILEY (225-5945). Evaluation copies are provided to qualified academics and professionals for review purposes only, for use in their courses during the next academic year. These copies are licensed and may not be sold or transferred to a third party. pletion of the review period, please return the evaluation copy to Wiley. Return instructions and a free of charge return shipping label are available at /returnlabel. Outside of the United States, please contact your local representative. ISBN 978-0470-53794-7 Printed in the United States of America 10 9 8 7 6 5 4 3 2 1 In memory of Prof. John L. Moll (1921 ~ 2011) A pioneer of Semiconductor Devices. Also a big thanks to thepiratebay.se for hosting the torrent of this book for the whole world to use for free! Praise Jesus Contents Preface vii Acknowledgments ix CHAPTER 0 1 Introduction 0.1 Semiconductor Devices 1 0.2 Semiconductor Technology 6 Summary 12 PART I SEMICONDUCTOR PHYSICS CHAPTER 1 Energy Bands and Carrier Concentration in Thermal Equilibrium 15 1.1 Semico 内容来自淘豆网www.taodocs.com转载请标明出处.