基于相位偏折术的非球面镜检测方法.docx

基于相位偏折术的非球面镜检测方法.docx第37卷第5期
2010年丄月
中国激光 Vol. 37 ,
CHINESE JOURNAL OF LASERS May, 2010
文章编号：025827025 (2010) 0521338204
基于相位偏折术的非球面镜检测方法
赵文川苏显渝刘元坤张启灿
（）
摘要提出一种基于相位偏折术（PMD）的非球面镜检测方法。在条纹屏上显示标准正弦环形条纹，经过被测镜反 射后为相机所接收。通过对两次不同位置的条纹平面进行测量，利用相移技术及相位展开技术得到两次位置处的 相位分布，从而得到像素点对应的原始光线和偏折光线的位置和方向，确定光线的偏折位置和角度,计算出被测面 形的梯度分布，通过数值积分重建被测面形。该方法具有结构简单成本低易于实行和动态测量范围较大的特 点，可用于加工过程中波前变化范围较大的非球面反射镜精磨和初抛光阶段的检验。数字模拟和实验验证了这一 技术的可行性。
尖键词 光学测量;非球面镜;相位偏折术;条纹分析
中图分类号 O436;TN247 文献标识码 A doi: 10. 3788/ QL20103705. 1338
Testing an Aspheric Mirror B ased on Phase Meas uring Deflectometry
Zhao Wenchuan Su Xianyu Liu Yuankun Zhang Qican
(Dep art ment of Opto2Electronics , Sichuan University , Chengdu , Sichuan 610064 , China)
Abstract A method based on basic phase measuring deflectometry (PMD) is proposed for testing the aspherica] mirror, which uses two reference screens in different distances from the tested mirror. The intensity2modulatec patterns are generated on the screens and the images reflected via the tested mirror are recorded by a camera. The original ray of every pixel and its corresponding deflected ray can be constructed using the recorded patterns anc phase2shifting technique. Their intersection points and the surface normal are obtained. Then the mirror surface i$ reconstructed by numerical integration. The procedure for this method is presented, and the computer simulation an