高温压力传感器研制.pdf

河北工业大学硕士学位论文 i 高温压力传感器的研制摘要高温压力传感器是指在高于125℃环境下能正常工作的压力传感器。在众多压力传感器中,高温压力传感器因其特殊的高温应用环境而日益受到人们的重视,典型应用于石油,化工,冶金,航空航天等领域。 论文介绍了多种高温压力传感器的现状,对它们的基本结构、工作原理、特点进行了论述。系统论述和研究了高温压力传感器的原理和设计。 本文主要研究的是通过确定了金属力敏电阻条的位置和排列方式,对此传感器芯片的膜片尺寸、电阻条和版图进行了设计,制作高温压力传感器的芯片。本课题研究的高温压力传感器,它以铜片为弹性膜片,电绝缘材料为AlN, 敏感层为铜或者金属钛力敏电阻条,力敏电阻受压力而产生形变时的电阻也随之变化,根据这一原理制备高温压力传感器。首先制备AlN绝缘层,然后制备金属力敏电阻条,然后用耐高温焊锡将芯片与金属基座焊接封装在一起,制成耐高温压力传感器,最后装入油压测试系统进行测试。这种压力传感器制作工艺与传统的一些半导体器件制作工艺相似,易于实现集成化,所以这是一种性能比较理想的高温压力传感器。 关键词: 压力传感器,高温焊接,直流磁控反应溅射,封接技术 高温压力传感器的研制 ii THE DESIGN OF HIGH TEMPERATURE PRESSURE SENSOR ABSTRACT High temperature pressure sensors refer to those sensors whose working temperature is higher than 125° all the pressure sensors. The high temperature pressure sensors were paid high attention to because of their excellent working performance at high temperature. Typical applications are found in petroleum, ch emical industry, aeronautics and astronautics. The research status on several kinds of high te mperature pressure sensors is introduced in the thesis. The principl e and design of the high temperature pressure sensors are discussed in detail. This article’s main research was manufactur ed high temperature pressure sensor chip which used the semiconductor planar technology by designing the sensor chip's diaphragm size and resistance strip and domain .The high temper ature pressure sensor's metal strain elastic element was produced by DC ron reactive s puttering. They take the sheet copper as the elastic diaphragm and their electric insulation ma terial is AlN. The sensitive layer is the metal copper or titanium as force sens itive resistance strip which ch anged along with the pressure. First sputtering the AlN thin film ,then sputtering the metal copper ,then weld the chip and the metal base together by the t hermostable soldering tin, the last proces s is processing and testing. Thus the high temperature pressure is made. It is easy to realize the integration because