zno thin films by mocvd参考-论文.pdf

Zinc oxide TECHNICAL FOCUS
Zinc oxide has unique properties that oxide thin film deposition,’s). by a variety of techniques, including sput-
transparent conducting oxides (TCO’s) tering, evaporation, sol-gel processing,
ZnO eyes the GaN niche and as transparent electrodes for displays pulsed laser deposition, spray pyrolysis,
and solar cells. molecular beam epitaxy (MBE) and metal
However, ZnO has several important
organic chemical vapor deposition.
properties that could change this [1]. A major obstacle to the commercial use
(MOCVD).All have been used to make
Similar to GaN, ZnO is a direct bandgap of ZnO films has previously been a lack
ZnO films for applications such as TCO’s.
semiconductor which means lasers could of reproducible processes to deposit p-
For applications in which epitaxial films
potentially be made from the material. ty