工艺参数对硫化锌薄膜光学性能和结晶特性的影响.pdf

表面技术 第 50 卷 第 6 期
·184· f Physics, Lanzhou 730000, China)
ABSTRACT: The influence of ion source bias voltage and deposition temperature on the optical properties and crystallization
properties of zinc sulfide films is studied. The ZnS film is prepared on K9 glass substrate by electron beam evaporation
technology. A spectrophotometer is used to test the optical properties of the film. The change rules of the refractive index and

收稿日期：2020-06-14；修订日期：2020-10-09
Received：2020-06-14；Revised：2020-10-09
基金项目：装备预研重点实验室基金项目（6142207190407）
Fund：Supported by the Funding Project of Key Laboratory for Equipment Pre-research (6142207190407)
作者简介：李坤（1988—），男，博士研究生，主要研究方向为表面工程。
Biography：LI Kun (1988—), Male, Doctor, Research focus: surface engineering.
通讯作者：熊玉卿（1969—），男，博士，研究员，主要研究方向为表面工程。邮箱：******@
Corresponding author：XIONG Yu-qing (1969—), Male, Doctor, Professor, Research focus: surface engineering. E-mail: ******@
引文格式：李坤, 熊玉卿, 王虎, 等. 工艺参数对硫化锌薄膜光学性能和结晶特性的影响[J]. 表面技术, 2021, 50(6): 184-192.
LI Kun, XIONG Yu-qing, WANG Hu, et al. Effects of process parameters on optical properties and crystallization characteristics