Single-photon detection in the mid-infrared up to 10 i μ i m wavelength using tungsten silicide superconducting nanowire detectors 2021 V. B. Verma.pdf

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upto10μmwavelengthusingtungsten
silicidesuperconductingnanowire
detectors
Citeas:APLPhotonics6,056101(2021);/
Submitted:::03May2021
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©2021Author(s).

Single-photondetectioninthemid-infrared
upto10μmwavelengthusingtungstensilicide
superconductingnanowiredetectors
Citeas:,056101(2021);doi:
Submitted:18February2021•Accepted:21April2021•
PublishedOnline:3May2021
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AFFILIATIONS
1NationalInstituteofStandardsandTechnology,Boulder,Colorado80305,USA
2JetPropulsionLaboratory,CaliforniaInstituteofTechnology,4800OakGroveDr.,Pasadena,California91109,USA
3DepartmentofElectricalEngineeringandComputerScience,MassachusettsInstituteofTechnology,Cambridge,
Massachusetts02139,USA
4DepartmentofPhysics,LancasterUniversity,Lancaster,UnitedKingdom
a)Authortowhomcorrespondenceshouldbeaddressed:******@
b)Electronicmail:******@
ABSTRACT
Wedevelopedsuperconductingnanowiresingle-photondetectorsbasedontungstensilicide,whichshowsaturatedinternaldetectioneffi-
-infraredrequiringsub-nanosecondtiming,
ultra-highgainstability,lowdarkcounts,andhighefficiency,suchaschemicalsensing,LIDAR,darkmattersearches,andexoplanet
spectroscopy.
©2021Author(s).Allarticlecontent,exceptwhereotherwisenoted,islicensedunderaCreativeCommonsAttribution(CCBY)license
(/)./
-formatHgCdTeavalanchephotodiode(APD)arrayshave
becomeavailable,whicharesingle-photonsensitiveandcanoperate
Efficientsingle-photoncounting,,
greaterthan50%,has,todate,beenachievedonlyatwavelengthswhichhasbeenusedextensivelyinastronomy,istheblockedimpu-
-ritybanddetector(BIB).Thesearesilicon-baseddetectorsthatare
infraredhaspotentialfornewapplicationsinastronomy,2aswellnotsingle-photonsensitivebut,nevertheless,havedemonstrated
asLIDAR,3darkmattersearches,4andthefundamentalstudyoffasthighquantumyield(>60%)overabroadrangeofwavelengths
–8Interestinthemid--
stemsprimarilyfromthepresenceofnumerousabsorptionsigna-monasHgCdTearraysduetothefactthattheyoperateatalower
turesformoleculessuchaswatervapor,carbondioxide,oxygenandtemperatureof∼10K.
ozone,methane,-photondetectorshavealsoshown
importantforunderstandingtheevolutionofourownplanetbutpromiseinthemid-infraredandingeneralhavetheadvantages
mayalsobesignaturesoflifeorindicatethepotentialhabitabilityofofsignificantlylowerdarkcountratesandimprovedgainstability
--
atmospheresisaprimeexampleofanapplicationrequiringsingle-lar,arraysofmicrowavekineticinductancedetectors(MKIDs)have
photon-countingdetectorswithultra-stablegainandhighefficiencybeenwidelyusedinastronomyduetotheirlargearrayformatsand
duetothephoton-,10arebeingexploredforuseinthemid-
Currently,themostcommondetectortechnologyinthemid-sensors(TESs)havealsobeenconsideredasadetectortechnology,
,todate,
,056101(2021);doi:,056101-1
©Author(s)2021

therehasnotbeenmuchexperimentalworkinoptimizingthemforsincethemaximumachievablefractionofthedepairingcurrenthas
themid-
lowtemperatures,,edgeroughnessandconstrictionsinthewidthof
Superconductingnanowiresingle-photondetectors(SNSPDs)thenanowire,duetofabricationimperfections,begintohavealarger
areanotherclassofsuperconductingdetector,
relativelyhightemperaturescomparedtoMKIDsandTESs,typi-resultinasuppressedswitchingcurrent,thecurrentatwhichthe
-
quantumopticsfieldduetotheirhighefficiency(98%at1550nm),15ductorswitchestothenormal(non-superconducting)
largerdynamicrange,highercountratescomparedtoMKIDsandtheminimumdetectablephotonenergydependsonthefractionof
TESsandintrinsicdarkcountratesoflessthan1count/,23–25itisimpor-
aslargeas1kilopixelhavealsobeendemonstrated,enablingatanttominimizetheimpactofedgeroughnessandconstrictions.
,lim-
hasfocusedprimarilyontelecommunicationwavelengths,recentlyitedbytheelectron-beamresistprocessing,whichisgoodenoughto
therehasbeensignificantinterestinusingthesedetectorsinthemid-yieldnanowiresdownto50nmwithoutsignificantdegradationin
,thelowjitterandhighdynamicrangemakeperformance.
SNSPDsidealforspace-to-groundorfiber-basedquantumkeydis-Athirdapproachtoimprovingenergysensitivityisreduc-
-
(quasiparticles)foragivenamountof
Here,wereportonSNSPDsbasedontungstensilicide(WSi)depositedenergyinthesuperconductorandalargerfractionof
,
-
aphotonabsorbedinthenanowiregeneratesanelectricaloutputductingtransitiontemperature(Tc)andthusaloweroperatingtem-
-
thatachievingsaturatedinternaldetectionefficiencyisacriticalstepinanincreaseinthecomplexityandcostofthecryogenics.
,18OurresultsindicatethatitAsoutlinedabove,themostpromisingapproachtolowering
maybepossibletoachievehighsystemdetectionefficiencyinthetheenergythresholdistoincreasetheresistivityofthesupercon-
mid-infraredwithWSiSNSPDsbyoptimizingtheabsorptionintheductingfilm,whichistypicallyachievedthroughthevariationof
nanowiresandthecouplingtotheactiveareaofthedetectors,,Tcisnotstronglydepen-
beendoneatnear-,whichallowsasignificant
Previousapproachestoachievingsensitivityinthemid-variationinresistivitywhilemaintainingafixedoperatingtemper-
,thefilmsremainamorphousover
(NbN),20NbNhashistoricallybeenthematerialofawiderangeofsputteringparametersandstoichiometries,27asver-
choiceforSNSPDsduetoitsrelativelyhighsuperconductingtran-ifiedbyx-raydiffractionmeasurementsforthesamplespresented
sitiontemperature(8–12K)allowingoperationat4Kanditsfasthere.

ordertoimprovetheenergysensitivityofthenanowiredetectorsand
extendthephoto-responsetolongerwavelengths,thereareseveral
possibleapproaches.
Thefirstapproachistodecreasethecross-sectionalareaofthe
nanowire,
resultsinahigherprobabilityofahotspot(non-superconducting
domain)beinggeneratedsincetheenergyperunitareaislarger,
andthermalconductionalongthelengthofthenanowireissmaller.
Usingthisapproach,saturatedinternaldetectionefficiencyhasbeen
demonstratedwithNbNSNSPDsuptoawavelengthof∼3μmusing
ultra-narrow30nm-,single-

40nm-wideNbNnanowiresalthoughtheinternaldetectioneffi-

Thesecondapproachtoimprovingenergysensitivityistoengi-

freecarrierdensity(increasingresistivity)ofthematerialresultsin
thedepositedenergybeingdividedamongfewerquasiparticles,thus
,thethermal
impedancealongthelengthofthenanowireisincreased,(Tc)asafunctionofsputtering
--

Thisapproachallowsthewidthandthicknessofthenanowirestothicknessgreaterthanorequalto50nm.
belarger,whichisbetterfromafabricationandyieldperspective
,056101(2021);doi:,056101-2
©Author(s)2021


Wefabricateddetectorsfromhigh-resistivityWSifilmsusinga
Si--sputteredfromseparateW
andSitargets,allowingthecompositionofthefilmstobetuned


powersfortheWandSitargetsare100and180W,respectively,
whichinourdepositionsystemresultsinasiliconcontentof15
at.%.WeincreasedtheSisputteringpowerfrom180to260W

inasiliconcompositionof35%±7%asestimatedbysecondary
ionmassspectroscopy(SIMS).,(QCL)setupinsidethecryostat,floodilluminating
○–60○(FWHM),
Tcvalueofthethinfilmissignificantlylowerthanthatshownincreatingasignificantamountofgeometricattenuation,inadditiontotheneutral
(-017).
isasingle10μm-longnanowireinsteadofalarge-areameanderin
ordertoreducetheprobabilityoffabricationdefectsorconstric-
fabricatedattheJetPropulsionLaboratory(JPL).29,30Thedivergence
tionsalongthelengthofthewirefortherelativelynarrowwidths31
investigated—(AlpesLasers)wasnotdirectlymeasuredbut
10μm-widemeanderingwirewaspatternedintotheWSifilmisexpectedtobesimilartotheotherlasersintheverticaldirection
∼○
inserieswiththenanowiretopreventlatchingtothenon-
%dutycycletominimizetheheatloadatthe