SiN x填充的定向耦合器型偏振无关解复用器 汪静丽.pdf

: .
光学学报
法进行建模仿真，对器件进行参数优化和性能分析，最终结果表明，所提出的解复用器的
耦合区长度仅 μm，插入损耗和串扰分别低至 dB 和- dB，串扰小于-10 dB 的
带宽可达 79 nm，且总体容差性良好，在未来的集成光路系统中具有潜在的应用价值。
关键词 定向耦合器；偏振无关；SiNx；解复用器
中图分类号 TN256 文献标志码 A

Directional coupler based polarization-independent demultiplexer
with SiNx filled
Wang Jingli1*, Liu Haiguang1, Zhang Yueteng1, Song Yuchen1, Shen Hanxiao1,
Chen Heming2,
1 College of Electronic and Optical Engineering & College of Flexible Electronics
(Future Technology), Nanjing University of Posts and Telecommunications, Nanjing
210023, China;
2 Bell Honors School, Nanjing University of Posts and Telecommunications, Nanjing
210023, China
Abstract A polarization-independent demultiplexer based on the introduction of SiNx
material in the gap of directional coupler is designed to separate 1310nm and 1550nm optical
signals. The plasma enhanced chemical vapor deposition (PECVD) is used to adjust the
refractive index of SiNx material filled in the waveguide gap of directional coupler, so that the
coupling length of TE polarization mode and TM polarization mode is equal at the same
wavelength, and the polarization-independent function of the device is realized. Under the
condition of polarization-independence, the waveguide gap is optimized. And the appropriate
values of the coupling length ratio for th