干涉法实时检测浅度非球面的方法分析.docx

摘要
光学制造技术、精密机械加工、计算机辅助设计及装调技术的发展,使非球面的制造和应用都有很大的改善。但是非球面元件在加工和检测上的困难, 制约了非球面在光学系统中的广泛应用。
本文从浅度抛物面非零位干涉检测角度出发,首先通过计算,确定视频探测器的最大分辨率,得到ZYGO干涉仪直接检测非球面的适用范围。然后通过编制Zernike多项式系数计算程序,并输入所测非球面的数学模型,计算理想波像差函数。通过ZYGO干涉仪直接检测浅度非球面,对获得的干涉图波像差数据与用编程计算得到的理想波像差数据进行波面相减,得到抛物镜的实际面形误差。
在用干涉法实时检测抛物面时,由于光线不是按原路返回,所以在测量过程中,光路中各种透镜不同位置的面形偏差也不可避免地混合在测量结果中。结合绝对检测法对抛物面作迸一步精确测量,再进行波面相减,得到抛物镜的绝对面形偏差,提高了测量精度。并利用自准法检验了所用方法检测数据的正确性,取得了较好的实验结果。
关键词:非球面检测;Zernike系数;波面拟合;波面相减;绝对测量
ABSTRACT
With the development of optical manufacturing,precise mechanical fabrication puter-aided designment and alignment,the condition of the production and the application of aspheres have been highly the disadvantages of manufacturing and testing of ponents restrict their widely use in optical
system.
In this paper,basing the technology ofnon-null testing ofweak paraboloid,we first ascertain the resolution of the video sensor putation,and further make sure the measurement range of the ZYGO interferometer for non-null testing of Zemike coefficients puted,the ideal wavefront aberration is
calculated by importing the math model of the asphere,The weak paraboloid is measured directly using ZYGO interferometer,its real surface error is obtained by wavefront fitting and subtracting between the testing result and puting result.
In the non—null configuration,the test wavefront does not retrace itself,and it follows a different return path through the transmission the measurement will contain aberrations from the interferometer optics additional to the test part bining the absolute measurement in the technique,the paraboloid is then under more accurate precision ofthe measurement is further improved,and the better experimental result is the parallel beam onto the paraboloid,the reliability of the technique is verified by the self-collimated way using a small sphere at the confocal position,the surface’S precision is gained.
Keywords:aspheric testing;Zem