氮化镓波导膜光栅红外波段的光学调制.doc

摘要
随着科学技术的不断发展,光学的研究也不断深入。波导膜光栅在现代光学的每个分支中都具有广泛的应用,新型的光栅已大量用于激光器、集成光路、光通信等方面。本课题对氮化镓波导膜光栅在红外波段的光学特性进行了研究。论文首先概述了光栅的相关内容和发展,亚波长光栅,微加工工艺,微机械加工系统,氮化镓材料的概述,基本特性等方面进行了相关介绍。然后我们用Rsoft软件中的DiffactMOD模块进行仿真计算,尝试用不同的物理参数组合进行仿真,仿真结果与实验测试的数据基本一致。并且通过光栅的角度扫描和厚度扫描,得到光栅的mapping反射图随着入射角度和薄膜厚度的变化对红外波段反射率的影响。本研究对研究氮化镓集成光电子器件有一定的指导意义。
关键字:光栅;亚波长光栅;微加工工艺;氮化镓;Rsoft软件;
ABSTRACT
Along with the development of science and technology, the research of optics is deepening. The waveguide grating is widely used in every branch of modern optics,new type of grating has been used in laser device, integrated optical path, munication and so on. This paper studies the optical properties of GaN film waveguide grating in infrared band. Firstly, it has an overview of the grating and development. A subwavelength grating, micro machining technology, micro machining system, an overview of GaN material and basic characteristics are introduced too. Then we use the DiffactMOD module in Rsoft to simulate the model with binations of physical parameters, The simulation results are in agreement with the experimental data. And through the angle of the grating scan and thickness scan,we can know the influence of the mapping reflection of the grating with the incident angle and film thickness on the reflectivity of the infrared band. This research will guide the research of Gan integrated optoelectronic devices.
Keyword:Grating;Subwavelength grating;Micro machining process;Gan;Rsoft
software
目录
第一章绪论 1
1
1
1
2
2
3
3
第二章氮化镓(GaN) 5
5
GaN基材料的基本特性 5
5
6
6
6
第三章微加工工艺 8
8
8
16
第四章氮化镓波导膜光栅红外波段仿真调制 18
Rsoft软件简介 18
DiffactMOD算法的操作步骤 19
实验仿真图形及分析 26
结束语 37
致谢 38
参考文献 39
第一章绪论

由大量等宽等间距的平行狭缝构成的光学器件称为光栅(grating)。[1]一般常用的光栅是在玻璃片上刻出大量平行刻痕制成,刻痕为不透光部分,两刻痕之间的光滑部分可以透光,相当于一狭缝。精制的光栅,在1cm宽度内刻有几千条乃至上万条刻痕。这种利用透射光衍射的光栅称为透射光栅,还有