室温直流反应磁控溅射制备透明导电In2O3Mo薄膜.pdf

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室温直流反应磁控溅射制备透明导电薄膜
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摘要在室温条件下采用直流反应磁控溅射法制备了新型透明导电薄膜。研究了溅射压强中氧气百分含量
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