碳纳米管气敏传感器微电极的制备与检测.doc


Fabrication and Detection of Carbon Nanotube Gas Sensor
Microelectrodes#
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RAN Xiangtao1,2, XU Hongmei1,2, WANG Zuobin1,2, WENG Zhankun2, SONG
Zhengxun1,2, MI Weixun1,2**
(1. College of Electronic Information Engineering, Changchun University of Science and
Technology, Changchun 130022;
2. Int. Research Centre for Nano Handling & Manufacturing of China, Changchun 130022)
Abstract: With the increasing needs for high-performance gas sensors in industrial production,
environmental monitoring and home safety, the research on gas sensors is ing more and more
important. In this paper, the electric field intensity distribution simulation process of interdigital
microelectrodes (IMEs) is discussed in detail to get the proper electrode structural parameters. The
IMEs on the ITO surface with a minimum gap of about 4μ m is achieved by lithography, which
provides a reliable, low-cost manufacturing method. ponents are made of the
multi-walled carbon nanotubes modified materials. The electrochemical properties of ponents
are analyzed and characterized. The gas-sensing property of the sensor is respectively detected under
both conditions of light presence and absence. The experiment result shows that the performance of the
nano-modified sensor under the condition of light presence is obviously improved.
Key words: nano manufacturing theory and