脉冲调制射频磁控溅射制备掺铝氧化锌薄膜的研究.pdf

学校代号 10524 学号 21009006 分类号密级硕士学位论文脉冲调制射频磁控溅射制备掺铝氧化锌薄膜的研究学位申请人姓名熊梦颖培养单位电子信息工程学院导师姓名及职称何翔教授学科专业等离子体物理研究方向磁控溅射新材料论文提交日期 2013年5月20日学校代号:10524 学号:21009006 密级: 中南民族大学硕士学位论文脉冲调制射频磁控溅射制备掺铝氧化锌薄膜的研究学位申请人姓名: 熊梦颖培养单位: 电子信息工程学院导师姓名及职称: 何翔教授专业名称: 等离子体物理研究方向: 磁控溅射新材料论文提交日期: 2013年5月20日论文答辩日期: 2013年6月2日答辩委员会主席: 黄新堂教授 Research about Al-doped ZnO films prepared by pulse-modulated RF ron sputtering by Xiong Mengying .(Shaanxi University of Science & Technology)2010 A thesis submitted in partial satisfaction of the Requirements for the degree of Master of Science In Physics in the Graduate School Of South-Central University for Nationalities Supervisor Professor He Xiang May, 2013 中南民族大学学位论文原创性声明本人郑重声明:所呈交的论文是本人在导师的指导下独立进行研究所取得的研究成果。除了文中特别加以标注引用的内容外,本论文不包含任何其他个人或集体已经发表或撰写的成果作品。对本文的研究做出重要贡献的个人和集体,均已在文中以明确方式标明。本人完全意识到本声明的法律后果由本人承担。作者签名: 日期: 年月日学位论文版权使用授权书本学位论文作者完全了解学校有关保留、使用学位论文的规定,同意学校保留并向国家有关部门或机构送交论文的复印件和电子版,允许论文被查阅和借阅。本人授权中南民族大学可以将本学位论文的全部或部分内容编入有关数据库进行检索,可以采用影印、缩印或扫描等复制手段保存和汇编本学位论文。本学位论文属于1、保密□,在______年解密后适用本授权书。 2、不保密□。(请在以上相应方框内打“√”) 作者签名: 日期: 年月日导师签名: 日期: 年月日√中南民族大学硕士学位论文 1 目录摘要··········································································································I Abstract······································································································II 第1章绪论······························································································1 NO和AZO的基本性质··········································································1 ZnO的晶体结构················································································1 AZO的导电机制················································································3 AZO的光学性能················································································4 ·····················································································4 成核阶段·························································································5 薄膜生长过程:··