显微激光拉曼光谱法鉴别SiC晶体的多 型体结构.doc

显微激光拉曼光谱法鉴别SiC晶体的多型体结构
韩荣江1, 2*收稿日期:2004-05-17
基金项目: 国家863计划(No. 2001AA311080)和国家自然科学基金(No. 60025409)资助项目
作者简介: 韩荣江(1971-),男,山东省人,博士。E-mail: ******@.
通讯作者: 王继扬,******@.;徐现刚,******@sdu.
,王继扬1,徐现刚1,胡小波1,董捷1,李现祥1,李娟1,姜守振1,
王丽1,蒋民华1
(1. 山东大学晶体材料国家重点实验室,济南 250100;
2. 青岛科技大学材料与环境工程学院,青岛 266042)
摘要:利用显微激光拉曼光谱法对掺氮6H-SiC单晶中的寄生多型体进行了鉴别,结果表明其中有4H-SiC和15R-SiC两种寄生多型体。不同SiC多型体的纵光学声子与等离子体激元的耦合模(LOPC模)表明:在掺氮6H-SiC单晶的生长条件下,6H-SiC的掺氮效应与4H-SiC存在明显差别,而与15R-SiC的掺氮效应相似。
关键词:显微激光拉曼光谱法;碳化硅单晶;多型体鉴别;掺氮效应
中图分类号: 文献标识码:A 文章编号: 1000-985X(2004)
Polytype Identification of SiC Crystals by Micro-Raman Spectroscopy
HAN Rong-jiang1, 2, WANG Ji-yang1, XU Xian-gang1, HU Xiao-bo1, DONG Jie1, LI Xian-xiang1, LI Juan1, JIANG Shou-zhen1, WANG Li1, JIANG Min-hua1
(1. State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China;
2. College of Materials and Environment Engineering, Qingdao University of Science and Technology, Qingdao 266042, China)
( Received 17 May 2004)
Abstract: The parasitic polytypes in nitrogen-doped 6H-SiC single crystal were identified by Micro-Raman spectroscopy. The results show that there are two parasitic polytypes such as 4H-SiC and 15R-SiC in 6H-SiC crystal. The longitudinal optical phonon-plasmon coupled modes (LOPC modes) of different SiC polytypes show that the nitrogen-doped effect of 6H-SiC is markedly different from that of 4