基于纳米多晶硅薄膜压力传感器管道压力监测系统设计与制作.doc

本科学生毕业论文
论文题目:
基于纳米多晶硅薄膜压力传感器管道压力监测系统设计与制作
学院:
电子工程学院
年级:
专业:
电子科学与技术(微电子)
姓名:
学号:
指导教师:
2013 年 5 月 10 日
摘要
本文阐述了纳米多晶硅薄膜压力传感器管道压力监测系统的设计与实现。
纳米多晶硅薄膜具有比普通多晶硅薄膜更优越的压阻特性且具有较高的灵敏度,适用于对微小压力变化的检测。本系统选用黑龙江大学制作的纳米多晶硅薄膜压力传感器作为整个监测系统的传感器件。本文对该传感器的基本结构及等效电路进行介绍,通过对其进行静态特性参数的标定,得到该传感器的输入-输出特性曲线。
结合ZigBee无线传输技术,本文设计并制作了一套远程压力实时监测系统,能够实现管道压力的多点监测。本系统采用ATmega8L单片机作为整个监测系统的控制核心设计整个系统的硬件电路,完成了模数转化和无线收发数据的功能。同时,该系统应用图形化编程语言LabVIEW编写上位机数据显示界面,完成对整个系统的调试与测试工作,验证了系统的可行性,为整个监测系统的实用化提供了可能性。
关键词
纳米多晶硅薄膜压力传感器;压力监测;ZigBee;LabVIEW
Abstract
This paper describes the design and the implementation of pipeline pressure monitoring system based on nano-polysilicon thin films pressure sensor.
Nano-polysilicon thin films has higher sensitivity and superior piezoresistive properties than the conventional polysilicon thin films. This system uses nano-polysilicon thin films pressure sensor which was made in Heilongjiang University as the sensor of the whole monitoring system. It is suitable for the detection of small changes in pressure. This paper introduces the basic structure and equivalent circuit of the sensor and obtains the sensor input-output characteristic curve by calibrating the static characteristic parameters.
Combined with the ZigBee wireless transmission technology, this paper designs and produces a remote pressure real-time monitoring system that e true multi-point monitoring of the pipeline pressure. This system uses ATmega8L as the control core of the monitoring system to design the hardware circuit of the whole system es true the function that converts the analog voltage to digital voltage and transmits data by wireless. Meanwhile,this system applies graphic programming language LabVIEW to finish the display interface puter, which can debug and test the whole system. This work verifies the feasibility of the system and provides the possibility for application of the monitoring system.
Key words
nano-polysilicon thin films pressure sensor;pressure monitoring;ZigBe