精密微孔电火花电化学组合加工技术研究(学术型)(硕士论文).pdf

哈尔滨工业大学工学硕士学位论文
摘要
随着科学技术和工业生产的发展,微小孔已被广泛应用于生产和生活中的各个
领域。电加工方法在微孔的加工方面有着其独特的优势,电加工主要包括电火花加
工和电化学加工。
电火花加工可在任何导电材料上进行各种类型孔的加工,加工过程中无宏观作
用力,对工具电极的强度要求低。电火花加工中,微孔内壁表面会有重铸层产生,
重铸层是由熔融材料受工作液快速冷却凝固而形成的,其内常存在大量的微裂纹。
在交变载荷的作用下,重铸层内的微裂纹会慢慢扩散,最终导致零件断裂损坏。采
用电化学方法进行微孔的加工,孔内壁表面质量好且无重铸层。但其加工精度和效
率低,加工出的微孔锥度大。
为获得具有较高加工精度和表面质量的微孔,进行了微孔的电火花电化学组合
加工实验。首先分析微孔的电火花加工和电化学加工的原理及各自的优缺点,提出
可以把两种加工方法相结合形成微孔的电火花电化学组合加工,并说明电火花电化
学组合加工的机理及优势;
其次,在课题组自行研制的微细电火花加工机床上,设计了电化学加工系统,
搭建出组合加工的硬件和软件平台,并在该平台上进行实验所用圆柱电极、削边电
极和异形电极的制备;提出了一种微细电极的电火花电化学组合加工制备方法,详
细说明了该方法的基本原理、优势、制备微细电极的工艺流程。
最后,进行微孔的电火花电化学加工实验,研究电火花和电化学加工参数对微
孔加工效果的影响,参数优化后,采用电火花电化学组合加工方法成功地加工出了
直径Ф200μm,深径比为 5,锥度为 ,具有较好表面质量的微孔。



关键词:微孔;电火花加工;电化学加工;电火花电化学组合加工;重铸层
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哈尔滨工业大学工学硕士学位论文
Abstract
With the development of science and industry, micro-holes have been widely used in
many fields of manufacture and life. Electrical machining technology has its unique
advantages in micro-hole machining, and it main involve electrical discharge machining
(EDM) and electrochemical machining (ECM).
EDM in able to machine various kinds of holes in any conductive material, the
processing has no macroscopic force and low demand on the rigidity of the tool electrode.
However, the recast layer will be generated in the wall surface of micro-hole by EDM
processing. The recast layer is formed by molten material under the working fluid rapid
cooling solidification and it often contains a lot of micro-cracks. Micro-cracks in recast
layer will tend to spread under alternating loads and which will cause fracture damage of
ponent. Electrochemical methods for the micro-hole processing, there will be a
good quality of wall surface and no recast layer. But ECM has a low machining accuracy
and efficiency, a high machining taper.
In this paper, EDM-bined processing experiment to obtain micro-hole with
high machining accuracy and surface quality was done. First processing principle and
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