气体种类 耐压测试 饱压测试 Helium leak Particle moisture Oxygen GN2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 -------- ≤ 50pc/cft at µm -------- -------- SiH4 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at µm ≤10 Inlet+10ppb ≤10 Inlet+10ppb %PH3H2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at µm ≤10 Inlet+10ppb ≤10 Inlet+10ppb NF3 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at µm ≤10 Inlet+10ppb ≤10 Inlet+10ppb %TMBH2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at µm ≤10 Inlet+10ppb ≤10 Inlet+10ppb