特气及毒气Detector侦测器验收标准-word资料(精).doc

特气扩充及毒气 Detector 侦测器扩充验收标准一. 气体管路要求及验收标准 Helium leak Particle moisture Oxygen GN2 keep the pressure ≥ 2hr,and the pressure is 9kg/cm2 keep the pressure ≥ 24hr,and the pressure is 8kg/cm2 -------- ≤ 50pc/cft at μm -------- -------- SiH4 keep the pressure ≥ 2hr,and the pressure is 9kg/cm2 keep the pressure ≥ 24hr,and the pressure is 8kg/cm2 ≤2× 10 -9 /sec ≤ 20pc/cft at μm ≤ 10 Inlet+10ppb ≤ 10 Inlet+10ppb %PH3H2 keep the pressure ≥ 2hr,and the pressure is 9kg/cm2 keep the pressure ≥ 24hr,and the pressure is 8kg/cm2 ≤2× 10 -9 /sec ≤ 20pc/cft at μm ≤ 10 Inlet+10ppb ≤ 10 Inlet+10ppb NF3 keep the pressure ≥ 2hr,and the pressure is 9kg/cm2 keep the pressure ≥ 24hr,and the pressure is 8kg/cm2 ≤2× 10 -9 /sec ≤ 20pc/cft at μm ≤ 10 Inlet+10ppb ≤ 10 Inlet+10ppb % TMB H2 keep the pressure ≥ 2hr,and the pressure is 9kg/cm2 keep the pressure ≥ 24hr,and the pressure is 8kg/cm2 ≤2× 10 -9 /sec ≤ 20pc/cft at μm ≤ 10 Inlet+10ppb ≤ 10 Inlet+10ppb 。 、规格及管径大小是否正确。 。 ,管线材质是否正确。 ,固定是否良好。 、高度、路径是否符合设计规格。 。 8目视检查各系统管线是否水平或垂直无歪斜。 9竣工数据须包含现场各系统供应之会签纪录及测试记录窗体。 10 竣工资料须包含每一气柜之配管示意图。 11竣工数据须包含工程相片。 13 竣工资料须包含承包商自主检查表。 14 所有竣工图面及竣工数据皆须有电子磁盘档案﹙ Auto CAD 2004 ﹚ 15 检查新增设备功能是否完全按照业主方进行设定,设备位置是否按图纸规划二气柜要求及测试标准 1. 功能要求 Name Qty Cyl Pu