聚合物前驱体法制备铌酸钾钠薄膜.pdf.pdf

第28卷第9期 2009年9月电子 ELECTRONIC 元件【PoNENTS 材料 ANDⅣ【ATERIALS 聚合物前驱体法制备铌酸钾钠薄膜刘培新1,一,朱孔军1,胡秀兰3,裘进浩1,纪士东2,3 (,江苏南京21 0016;,江苏南京21 0009; ,名古屋463--8560,日本) 摘要:、碳酸钠和制得的氢氧化铌为原料,柠檬酸为螯合荆,乙二醇为酯化剂,通过聚合物前驱体法在Si02/Si基板上制备了铌酸钾钠(KNN)。结果显示:在pH=,金属阳离子与柠檬酸摩尔比为l:3,柠檬酸与乙二醇的摩尔比为2:l时,;随着退火温度的增加,℃时,薄膜结晶性相对较好;900℃退火处理后,薄膜晶粒有定向生长趋势. 关键词:铌酸钾钠:草酸铵;薄膜;聚合物前驱体法 doi:- 中图分类号: 文献标识码:A 文章编号:(2009) Preparation thinfilmby thepolymeric precursor method LIU Peixinl”,ZHU Kongjunl,HU Xiulan3,QIU Jinha01,Jl Shidon92’3 ( University ofAeronautics andAstronautics,Sanjing210016,China; University ofTechnology, Nanjing 210009,China; Industrial Science andTechnology,Nagoya463--8560,Japan) Abstract:In thisstudy,niobium hydroxide was synthesized with andwithoutthe addition ofammonium then,potassium-sodium niobate(1(M町films WeI"eprepared onthe Si02/Si substrate using thepolymeric precursor method, withsodiumcarbonate,potassium carbonate aswell勰the obtainedniobium hydroxide as raw materials,citric acid(CA)as chelating agent and ethylene glycol(EG)∞esterification effects ofammonium oxalate addition and annealing temperatures on theproperties ofprepared KNN fi