一种便携式能量色散X射线荧光光谱仪的设计.pdf

沈阳师范大学
硕士学位论文
一种便携式能量色散X射线荧光光谱仪的设计
姓名:张宇
申请学位级别:硕士
专业:粒子物理与原子核物理
指导教师:邓玉福
20100301
一种便携式能量色散 X 射线荧光光谱仪的设计
一种便携式能量色散 X 射线荧光光谱仪的设计

中文摘要

作为一种无损且精确的测量方法,能量色散 X 射线荧光光谱仪(EDXRF)
目前在分析领域有着举足轻重的地位,它已经广泛的应用到了地质、材料、冶金、
环保、考古等诸多领域。特别是便携式能量色散 X 射线荧光光谱仪的出现,为
现场检测和流动分析提供了可能性。然而一台常规的 X 射线荧光光谱仪的价格
一般都在二十几万到上百万不等,昂贵的价格使其应用受到了限制。
本文研制了一种便携式能量色散 X 射线荧光光谱仪。激发源采用国产小口
径 Mo 靶 X 光管,以变频技术设计了配套的高压电源和灯丝电源,探测器为电
制冷半导体探测器。从理论上分析了该仪器的最佳元素激发范围。设计了 X 荧
光光路,确立了 X 荧光光路的最佳几何尺寸。通过纯元素的能谱测量,研究了
该光谱仪的能量定标曲线,并确立的最佳管电流,建立了最佳工作电压模型。利
用自制的合金样品测试,对分析的精确度和准确度进行了评估。
本文所设计的 X 射线荧光光谱仪具有体积小,成本低、重量轻、携带方便
等特点,可适用于高校、科研院所和企业从事元素无损检测分析的需要。

关键词:X 射线,荧光分析,X 光管,能量色散















I
一种便携式能量色散 X 射线荧光光谱仪的设计
A design of portable energy dispersive X-ray
Fluorescence Analyzer
Abstract
As an accurate and nondestructive testing method of measurement, the Energy-
Dispersive X-ray Fluorescence Spectrometer (EDXRF) plays an important role in
analysis field, covering geology, materials, metallurgy, environment, archaeological
and so on. Especially the appearance of the portable EDXRF provides the possibility
of in situ detection and flow analysis. However, the prices of mon EDXRF are
generally expensive,from two hundred thousand to millions of dollars, which limits
its application.
In this paper, a kind of portable EDXRF is developed. Its excitation source is Mo
target X-ray tube with small-caliber. The design of the high voltage power supply and
the filament power supply are based on frequency conversion technology. The probe
is electric refrigerating semiconductor. The best excitation range of excitation
source is analyzed theoretically. The path of X-ray fluorescence has been designed
and its best geometry size has been designed. The energy calibration curve of the
instrument has been established, the best tube current has been radiated and the
optimal working voltage model has been founded by