-+透射电子显微镜.ppt

第2章透射电子显微镜(Transmission Electron Microscope - TEM)Illumination systemImaging systemImage viewing and recordingGeneral ai G2 20 (FEI 公司)功能及用途应用领域:用于金属材料、陶瓷材料、复合材料及高分子生物材料的结构及化学组成的微观可视性观察和分析主要用途:透射电镜样品形貌,相应选区电子衍射观察微衍射及相干电子衍射观察;配合特征X射线能谱仪(EDS)进行成分分析技术指标点分辨率: nm线分辨率: nm物镜球差系数:::25X~1050000X常用附件:EDAX 能谱仪FIGURE . A selection of mercial TEMs: (A) JEM MeV HVEM (B) Zeiss HRTEM with a Cs corrector and an in-column energy filter (C) Hitachi 200 keV dedicated STEM (D) JEOL 200 keV TEM/STEM (E) Nion 200 keV ultrahigh vacuumSuperSTEM (F) FEI Titan. FIGURE . A selection of mercial TEMs: (A) JEM MeV HVEM. Note the size of the instrument; often the high-voltage tank is in another room above the column. (B) Zeiss HRTEM with a Cs corrector and an in-column energy filter. Note the large frame to provide high mechanical stability for the highest-resolution performance. (C) Hitachi 200 keV dedicated STEM; note the absence of a viewing chamber. Such instruments are often designed to aid failure analysis for the semiconductor device manufacturers. Specimens thinned from wafers on the production line can be easily transferred and examined. (D) JEOL 200 keV TEM/STEM; note also the absence of a viewing chamber. (E) Nion 200 keV ultrahigh vacuum SuperSTEM; the only US-manufactured (S)TEM and current holder of the world record image resolution (F) FEI Titan. Comparison with Ruska’s instrument (Figure ), which is 70–80 y e a r s o l d e r t h a n t h e s e i n s t r u me n t s , i s i n s t r u c t i v e . 透射电子显微镜的结构与成像原理透射电子显微镜是以波长极短的电子束作为照明源,用电磁透镜聚焦成像的一种高分辨率、高放大倍数的电子光学仪器。There are four ponents to a transmission electron microscope:1)an electron optical column2)a vacuum system3)the necessary electronics (lens supplies for focusing and deflecting the beam and the high voltage generator for the electron source) 4)software