自组装功能膜诱导合成纳米二氧化锡晶态薄膜分析.pdf

中文摘要本文研究了一种低温水溶液中制备纳米晶态薄膜材料的新的合成方法。将仿生合成技术与液相沉积技术相结合,在800C下,利用基底表面的功能化自组装膜层对前驱体溶液的诱导作用,在单晶硅或玻璃基底表面制备出与基底结合紧密、结构致密均一、厚度可控的二氧化锡纳米晶态薄膜。首先对3一巯丙基三甲氧基硅烷(MPS)在带有羟基的基底表面自组装成膜过程进行了研究。利用x一光电子能谱仪、接触角分析仪、原子力显微镜考察了不同MPS溶液浓度和不同反应时间对于自组装膜层生长过程的影响。结果表明, 溶液浓度和反应时间对于自组装膜层的生长影响显著。较低的溶液浓度和适宜的反应时间有利于MPS分子在羟基化表面形成排列规则、结合紧密的自组装膜层。为了得到带有磺酸根头基的硅烷分子膜层,利用醋酸与双氧水混合溶液对膜层的表面巯基进行了原位氧化。接触角及XPS测试结果表明,该方法能够保证表面巯基完全氧化。利用这种带有磺酸根功能头基的短链硅烷自组装膜层的诱导作用,首次从水溶液中沉积出具有纳米晶体结构的二氧化锡薄膜。利用x射线衍射仪、、扫描电镜等对二氧化锡膜层的结构、相组成和表面形貌进行了考察, 发现这种从较低温度下的四氯化锡水溶液中沉积的二氧化锡薄膜具有金红石型晶体结构,且膜层结构致密均一,与基底表面结合力强,平均生长速度为4 nm/h。实验结果证明了有机自组装膜层对于二氧化锡薄膜的成核和生长具有明显的诱导作用,促进前驱体溶液在基底表面异相成核和沉积。本实验制备的二氧化锡薄膜具有良好的半导体阻温特性以及可见光透过率,可望用于气敏元件和太阳能电池的透明导电薄膜等功能器件的制备。关键词: 仿生合成液相沉积自组装单层和多层膜二氧化锡晶态薄膜 ABSTRACT A new thinfilmsynthetic method was investigated involving preparation of nanocrystalline thinfilms atlOW temperature in an aqueous using the biomimetic systhesis technique and the liquid deposition technique,the nanocrystalline tinoxide thinfilmswere deposited on sulfonated self-anic layers on the silicon and glass substrates at 800C as—deposition films on theSAMs were uniform,dense,with excellent adherence and controlled thickness. Firstly,the growth behavior and structure ofself-assembled monolayers(SAMs) formed from3-mercaptopropyltrimethoxysilane(MPS,(CH30)3SiCH2CH2CH2SH)on hydroxylated wafcrs was investigated inthe present effects ofthe alkoxysilane concentration and immersion intervals on themonolayers’formation were characterized by X·ray photoelectron spectroscopy()(PS),contact angle measurement and Atomic foroemicroscopy rAFM).111e resultssuggested thatthe effectof solution concentration andimmersion time on the structure ofMPS self-assembled layers on hydroxylated surface both low MPS concentration and suitableimmersion well-ordered andclosely self-assembled MPS layers COuld beprepared on the由ydroxylated ,e insituoxidization of the—SH groups tothe desired-S03H groups were